Equipment Specifications:

MAG Zoom mode : 1,000 - 800,000x     Scan Mode : 100 - 400x
Resolution : 0.14nm lattice image

                  0.3nm point to Point

Specimen stage:  Movement ± 1mm(x,y),±0.25mm(Z)

Viewng Sample s :  Fluorescent screen 160mm Dia

                             Focusing screen 110mm dia